Application the Ion Beam Sputtering Deposition Technique for the Development of Spin-Wave Structures on Ferroelectric Substrates

The microwave properties of structures in the form 2 μm iron-yttrium garnet (YIG) films, grown by ion beam sputtering deposition method on epitaxially mismatched substrates ferroelectric ceramics based lead zirconate titanate (PZT, PbZr0.45Ti0.55O3), are discussed. obtained were formed and pre-smoothed planarization with use an anti-diffusion layer titanium dioxide TiO2. atomic force microscopy showed that allows for reaching a nanoscale level roughness (up to 10 nm). presence smooth plane–parallel interfaces YIG/TiO2 TiO2/PZT is evidenced scanning electron performed focused gallium beams. Ferromagnetic resonance spectroscopy revealed broadening absorption line ferrite layers ≈ 100 Oe. This associated defects caused ceramic substrate non-ideality. estimated damping coefficient spin waves turned out be ~10−3, which two orders magnitude higher than ideal YIG single crystal. YIG/TiO2/PZT can used study waves.